Method of producing heat treating furnace member

Details Method of producing heat treating furnace member Method of producing heat treating furnace member

1987-09-08

1989-06-06

Derrington, James

Plastic and nonmetallic article shaping or treating: processes

Including step of generating heat by friction

264 62, 264 65, 264 82, 264 86, 264344, C04B 3556

Patent

active

048369659

ABSTRACT:
A method of producing a high density and high strength silicon carbide member for a heat treatment furnace to be used in the manufacture of a semiconductor device. In this method, SiC powder, carbon powder, deflocculating agent and water are mixed to form a slip. Then the slip is formed into a desired shape, cured under a nonoxidizing atmosphere, and removed of any impurity contained in the shaped body. Finally, the shaped body is immersed in a molten silicon to convert the carbon in the shaped body into silicon carbide.

REFERENCES:
patent: 2938807 (1960-05-01), Anderson
patent: 3951587 (1976-04-01), Alliegro et al.
patent: 4127629 (1978-11-01), Weaver et al.
patent: 4482512 (1984-11-01), Alsop
patent: 4619798 (1986-10-01), Tanaka et al.

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