Method of producing fine particles

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating

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Details

75251, 75254, 75255, 204192M, 204192EC, 204192SP, C23C 1500

Patent

active

045840784

ABSTRACT:
A method of producing fine particles with a particle size of submicron or finer which comprises the steps of:

REFERENCES:
patent: 4396643 (1983-08-01), Kuehn et al.
Oya et al., Japan J. App. Phys.; 21 (1982) pp. 554-555.
Wehner, Advances in Electronics and Electron Physics, vol. 7, 1955, pp. 274-277.
Guntherschulze et al., Z. Physik, vol. 119 (1942) pp. 685-695.
Kirk-Othmer, Encyclopedia of Chemical Technology, 3rd Ed., 1983, vol. 19, pp. 36-37.

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