Method of producing films using a peeling jig

Details Method of producing films using a peeling jig Method of producing films using a peeling jig

1988-05-24

1989-05-09

Dawson, Robert A.

Adhesive bonding and miscellaneous chemical manufacture

Methods

Surface bonding and/or assembly therefor

156160, 156229, 156249, 156267, 156292, 156344, 156494, 156584, 428910, B32B 3118

Patent

active

048286400

ABSTRACT:
The invention concerns a method of producing protective films or the like used as protective covers for photomasks or reticles. To peel a thin film off a substrate, a peeling jig constituted by a flexible annular frame with an adhesive applied thereon is pressed against the thin film applied on the substrate; a portion of the peeling jig is grabbed after the peeling jig and the thin film are adhered together; and the peeling jig and the film are peeled off the substrate. Before adhering the peeled film onto a side end surface of a pericle frame, of the two edges of the pericle frame, at least the edge formed by an inside surface thereof and the side end surface thereof is chambered.

REFERENCES:
patent: 4631103 (1986-12-01), Ametani
patent: 4631110 (1986-12-01), Tsumura et al.
patent: 4732642 (1988-03-01), Ametani
patent: 4767484 (1988-08-01), Schott et al.

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