Method of producing diamond films

Details Method of producing diamond films Method of producing diamond films

1990-01-04

1993-07-06

Robinson, Ellis P.

Stock material or miscellaneous articles

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Physical dimension specified

51295, 51307, 76DIG12, 407119, 428408, 428698, 428701, 428702, 428212, B32B 900

Patent

active

052252752

ABSTRACT:
Disclosed is a method for the production of diamond films, which comprises introducing a diamond-forming gas into a reaction chamber in which a substrate is located, activating the gas in the reaction chamber and depositing diamond on the substrate by decomposition of the gas, wherein the diamond-forming gas is a gas or gas mixture containing hydrogen, oxygen and carbon atoms at an atomic ratio satisfying requirements represented by the following formulae:

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Hirose et al "Synthesis of Diamond Films by Thermal CVO Using Organic Compounds" Jap. Journ. of Appl. Phys. vol. 25, No. 6, Jun. 1986.

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