Method of producing an integral resonator sensor and case

Details Method of producing an integral resonator sensor and case Method of producing an integral resonator sensor and case

2005-09-20

2005-09-20

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S592100, C029S602100, C216S065000, C451S005000, C451S041000, C361S283100, C361S301100

Reexamination Certificate

active

06944931

ABSTRACT:
The present invention discloses an inertial sensor having an integral resonator. A typical sensor comprises a planar mechanical resonator for sensing motion of the inertial sensor and a case for housing the resonator. The resonator and a wall of the case are defined through an etching process. A typical method of producing the resonator includes etching a baseplate, bonding a wafer to the etched baseplate, through etching the wafer to form a planar mechanical resonator and the wall of the case and bonding an end cap wafer to the wall to complete the case.

REFERENCES:
patent: 392650 (1888-11-01), Watrous
patent: 4898031 (1990-02-01), Oikawa et al.
patent: 5226321 (1993-07-01), Varnham et al.
patent: 5421312 (1995-06-01), Dawson
patent: 5646346 (1997-07-01), Okada
patent: 5665915 (1997-09-01), Kobayashi et al.
patent: 5783749 (1998-07-01), Lee et al.
patent: 5894090 (1999-04-01), Tang et al.
patent: 5905202 (1999-05-01), Kubena et al.
patent: 5920012 (1999-07-01), Pinson
patent: 6009751 (2000-01-01), Ljung
patent: 6044705 (2000-04-01), Neukermans et al.
patent: 6164134 (2000-12-01), Cargille
patent: 6182352 (2001-02-01), Deschenes et al.
patent: 6263552 (2001-07-01), Takeuchi et al.
patent: 6282958 (2001-09-01), Fell et al.
patent: 6289733 (2001-09-01), Challoner et al.
patent: 6367786 (2002-04-01), Gutierrez et al.
patent: 6515278 (2003-02-01), Wine et al.
patent: 44 42 033 (1996-05-01), None
patent: 01129517 (1989-05-01), None
patent: WO 96/38710 (1996-12-01), None
patent: WO 98/15799 (1998-04-01), None
“Planar resonator sensor for moisture measurements”; Skulski, J.; Galwas, B.A.; Microwaves and Radar, 1998. MIKON '98., 12th International Conference on , vol.: 3, May 20-22, 1998; pp.: 692-695.
D. Wright et al., “The HRG Applied to a Satellite Attitude Reference System,” Guidance and Control, American Astronautical Society, Advances in Astronautical Sciences, 1994, 86:1-13.
M.W. Putty et al., “A Micromachined Vibrating Ring Gyroscope,” Solid State Sensor and Actuator Workshop, Transducer Research Foundation, Hilton Head, 1994, pp. 213-220.
T.K. Tang et al., “Silicon Bulk Micromachined Vibratory Gyroscope,” Solid State Sensor and Actuator Workshop, Transducer Research Foundation, Hilton Head, South Carolina, Jun. 2-6, 1996, 6 pgs.
N. Barbour et al., “Micromechanical Silicon Instrument and Systems Development at Draper Laboratory,” AIAA Guidance Navigation and Control Conference, American Institute of Aeronautics and Astronautics, San Diego, CA, Jul. 29-31, 1996, Paper No. 96-3709, pp. 1-7.
J.D. Johnson et al., “Surface Micromachined Angular Rate Sensor,” A1995 SAE Conference, Paper No. 950538, pp. 77-83.

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