Fishing – trapping – and vermin destroying
Patent
1986-12-29
1989-07-25
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
437918, H01L 21265
Patent
active
048513598
ABSTRACT:
The invention enables precise and reliable adjustment of the resistance of a resistor formed in a zone (16) of monocrystalline semiconductor material (11) in spite of the presence of a density gradient of electrically active ions at the periphery of the zone, as a result of the implantation of ions of rare gases (+) in the zone. Furthermore, when the standard method of producing a resistor in a polycrystalline semiconductor material is used, implanting rare gas ions in the resistive zone enables precise and reliable adjustment of the resistance. The invention also maintains the dimensions of the initially resistive zone, despite later annealing, and is suitable for large-scale integration of circuits.
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Electronics, vol. 53, No. 1, Jun. 1980, pp. 39-40, Allan, Roger.
Boudou Alain
Doyle Brian
Marchetaux Jean-Claude
Bull S.A.
Chaudhuri Olik
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