Method of producing amorphous magnetic film

Details Method of producing amorphous magnetic film Method of producing amorphous magnetic film

1991-06-26

1993-04-20

Wyszomierski, George

Metal treatment

Process of modifying or maintaining internal physical...

Magnetic materials

148525, 427559, 427597, H01F 4122

Patent

active

052039293

ABSTRACT:
An amorphous magnetic film is produced by irradiating laser beams onto a magnetic metallic target and depositing an evaporated material on a substrate. During or after the evaporation process, the film formed on the substrate is annealed at a temperature lower than a crystallization temperature. The annealing process enables elimination of stresses from the film, thereby improving soft magnetic properties.

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