Method of producing amorphous magnetic film

Metal treatment – Process of modifying or maintaining internal physical... – Magnetic materials

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148525, 427559, 427597, H01F 4122

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active

052039293

ABSTRACT:
An amorphous magnetic film is produced by irradiating laser beams onto a magnetic metallic target and depositing an evaporated material on a substrate. During or after the evaporation process, the film formed on the substrate is annealed at a temperature lower than a crystallization temperature. The annealing process enables elimination of stresses from the film, thereby improving soft magnetic properties.

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