Stock material or miscellaneous articles – Self-sustaining carbon mass or layer with impregnant or...
Patent
1985-11-13
1987-04-28
Ives, P. C.
Stock material or miscellaneous articles
Self-sustaining carbon mass or layer with impregnant or...
428447, 428426, 428441, 428462, 428689, 204173, B32B 900, C01B 3100
Patent
active
046614095
ABSTRACT:
A method for producing amorphous carbon coatings on substrates by degrading a gaseous hydrocarbon compound in an ionized gas atmosphere within a reaction chamber. An electromagnetic alternating field is used for the excitation of the plasma. To achieve the object of increasing the deposition rate and permitting substrates even of great surface area to be uniformly coated, the frequency of the electromagnetic alternating field is selected in the microwave region (915 to 2,540 MHz). Furthermore, the microwave energy is put into the gaseous atmosphere by means of at least one ladder-type waveguide situated outside of the reaction chamber. The invention also relates to a substance provided with an amorphous carbon coating, in which an adhesion-mediating coating consisting of a polymer from the group of the siloxanes or silazanes is provided between the substrate and the amorphous carbon coating.
REFERENCES:
patent: 4181772 (1980-01-01), Chu et al.
patent: 4412903 (1983-11-01), Green et al.
patent: 4524106 (1985-06-01), Flasck
Kieser Jorg
Neusch Michael
Ives P. C.
Leybold-Heraeus GmbH
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