Method of producing a topology-optimized electrode for a...

Details Method of producing a topology-optimized electrode for a... Method of producing a topology-optimized electrode for a...

2004-07-09

2010-02-09

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S846000, C216S038000, C310S31300R, C310S348000, C310S365000

Reexamination Certificate

active

07657983

ABSTRACT:
In a method of producing an electrode for a resonator in thin-film technology, the electrode of the resonator is embedded in an insulating layer such that a surface of the electrode is exposed, and that a surface defined by the electrode and the insulating layer is substantially planar.

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Machine Translation of JP2000340542.

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