Method of producing a thin-film resonator

Details Method of producing a thin-film resonator Method of producing a thin-film resonator

2005-12-13

2010-10-05

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S831000, C029S846000, C216S041000, C216S047000, C438S717000, C310S31300R, C310S321000

Reexamination Certificate

active

07805820

ABSTRACT:
A thin-film resonator and a method for producing a thin-film component includes, for the purpose of structuring an upper first dielectric layer, a mask that comprises a second dielectric layer facing the upper dielectric layer and a photoresist layer. Initially, the photoresist layer that serves as photomask during the structuring of the second dielectric layer is structured. The structures of the second dielectric layer, together with the structures of the photoresist layer located thereabove, form a mask that is used for structuring the first dielectric layer.

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