Method of producing a thin film magnetic head

Details Method of producing a thin film magnetic head Method of producing a thin film magnetic head

1988-01-11

1989-06-27

Hall, Carl E.

Metal working

Method of mechanical manufacture

Electrical device making

156656, 360119, 427116, 427131, G11B 542

Patent

active

048416240

ABSTRACT:
A method of producing a thin film magnetic head by successively depositing on a substrate a first magnetic material, a gap material, an electrically conductive material consisting of a coil, an insulating film, a second magnetic material and a protecting film, wherein the improvement comprises a step for forming a recessed portion in the insulating film at a portion corresponding to a gap portion on the air bearing surface side, the bottom surface of said recessed portion serving as an exposed portion on the upper surface of the gap material and the side surfaces of said recessed portion being tapered, a step for forming a recessed portion in the gap material by etching using the insulating film with the recessed portion as a mask and making the thickness thereof equal to the gap length, and a step for depositing a second magnetic material on the whole surface, so that the recessed portion formed in the gap material will have a rectangular shape with its one side being equal to a gap depth and its another side being equal to a track width. Unlike the conventional art, no thick photoresist film is used in a step for determining the gap depth and the track width, making it possible to obtain a thin film magnetic head having a small gap depth and a narrow track width maintaining high precision.

REFERENCES:
patent: 4550353 (1985-10-01), Hirai et al.

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