Method of producing a surface acoustic wave device

Details Method of producing a surface acoustic wave device Method of producing a surface acoustic wave device

2007-05-23

2008-11-11

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S848000, C029S856000, C029S841000, C310S31300R, C310S31300R, C310S349000

Reexamination Certificate

active

07448119

ABSTRACT:
A method of producing a surface acoustic wave device includes a sacrificial-layer forming step of forming a sacrificial layer on a piezoelectric substrate so as to cover comb electrodes and reflectors, a space-forming-member forming step of forming a space-forming member while openings are formed near the reflectors along a surface of the sacrificial layer, a sacrificial-layer removing step of removing the sacrificial layer from the openings of the space-forming member, and a resin sealing step of sealing a surface acoustic wave element with sealing resin, the surface acoustic wave element having an excitation protection space formed between the reflectors and the comb electrodes by the space-forming member.

REFERENCES:
patent: 6060818 (2000-05-01), Ruby et al.
patent: 7246421 (2007-07-01), Namba et al.
patent: 09162689 (1997-06-01), None
patent: 2002-232260 (2002-08-01), None

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