Superconductor technology: apparatus – material – process – High temperature – per se – Having tc greater than or equal to 150 k
Patent
1987-09-25
1992-07-21
Silverberg, Sam
Superconductor technology: apparatus, material, process
High temperature , per se
Having tc greater than or equal to 150 k
505730, 505731, 427 62, 427 63, 20419224, B05D 512
Patent
active
051322803
ABSTRACT:
A method of forming a superconductive metal oxide film on a substrate is disclosed. The method comprises depositing a metal layer on the substrate and heat treating the metal layer in an oxygen-containing atmosphere such that the oxide film is formed therefrom. The metal layer is deposited such that it is substantially free of reactive constituents, e.g., oxygen and/or fluorine, and such that it contains all the metal constitutents that are to be contained in the oxide film. Advantageously, the metal layer is deposited such that the various metal constituents (e.g., Y, Ba, and Cu) are substantially mixed. The inventive method simplifies deposition control since the densities of the metal deposits are well known and constant, and permits relatively rapid deposition (e.g., by DC sputtering) since the targets are not subject to oxidation. A multi-stage heat treatment process, with patterning of the oxide layer carried out at an intermediate stage of the process, that can result in improved pattern definition and can avoid deterioration of the oxide film as a consequence of the patterning, is also disclosed.
REFERENCES:
patent: 4316785 (1982-02-01), Suzuki et al.
patent: 4389295 (1983-06-01), Davey et al.
patent: 4410407 (1983-10-01), Macaulay
patent: 4591417 (1986-05-01), Kaiser et al.
patent: 4611390 (1986-09-01), Tanaka et al.
patent: 4826808 (1989-05-01), Yurek et al.
Gruen et al., J. Electrochem. Soc., Jun., 1987, pp. 1588-1589.
Evetts et al., Ext. Abstracts-High Tc Superconductors, (MRS-Proceedings Apr. 23-24 1987) pp. 227-229.
Bunshah et al., Deposition Technologies for Films and Coatings (Noyes, Park Ridge, NJ) c. 1982 p. 115.
Jin et al., "High Tc Superconductors-Composite Wire Fabrication" Appl. Phys. Lett 51(3) Jul. 1987 pp. 203-204.
Koch et al., "Thin Films and Squids made from YBa.sub.2 Cu.sub.3 O.sub.y " Extended Abstracts Edited by Gubser et al. Apr. 1987 (Anaheim, CA) pp. 81-84.
"High Superconducting Transition Temperatures in Sputter-Deposited YBaCuO Thin Films," Nature, vol. 326, No. 30, Apr. 1987, pp. 857-859.
"Electrical Properties of Superconducting (La.sub.l-x Sr.sub.x).sub.2 CuO.sub.4 and Ba.sub.2 YCu.sub.3 O.sub.7-.delta. Thin Films", NTT Electrical Communications Laboratories, Tokai, Ibaraki, Japan.
"Preparation of Superconducting YBa.sub.2 Cu.sub.3 O.sub.x Thin Films by Oxygen Annealing of Multilayer Metal Films", Appl. Phys. Let., vol. 51, No. 11, Sep. 1987. pp. 858-860.
"Thin Films and Squids Made from YBa.sub.2 Cu.sub.3 O.sub.y ", IBM Thomas J. Watson Research Center, Yorktown Heights; NY, pp. 81-84.
"Superconducting Thin Films of the Perovskite Superconductors by Electron-Beam Deposition", Stanford University, Dept. of Applied Physics, Stanford, CA, pp. 169-171.
"Critical-Current Measurment in Epitaxial Films of YBa.sub.2 Cu.sub.3 O.sub.7-x Compound", Phys. Rev. Let., vol. 58, No. 25, Jun. 1987, pp. 2684-2686.
"Bulk Superconductivity at 91K in Single-Phase Oxygen-Deficient Perovskite Ba.sub.2 YCu.sub.3 O.sub.9-.delta. ", Phys. Rev. Let., vol. 58, No. 16, Apr. 1987, pp. 1676-1679.
"New Superconducting Cuprate Perovskites", Phys. Rev. Let., vol. 58, No. 18, May 1987, pp. 1888-1890.
"Superconductivity at 155K" Phys. Rev. Let., vol. 58, No. 24, Jun. 1987, pp. 2579-2581.
Fiory Anthony T.
Gurvitch Michael
AT&T Bell Laboratories
Pacher E. E.
Silverberg Sam
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