Method of producing a silicon film with micropores

Details Method of producing a silicon film with micropores Method of producing a silicon film with micropores

1987-12-23

1989-01-31

Sever, Frank

Liquid purification or separation

Filter

Material

264 42, 264 456, 264 464, 264DIG48, B01D 1302

Patent

active

048013803

ABSTRACT:
The present invention relates to a method of producing micropores having diameters of less than 20 nanometers in straight sides in silicon film. The silicon film produced by this process may be attached to a substrate material and used as a filter in molecular separation processes.

REFERENCES:
patent: 4373399 (1983-02-01), Belogazov et al.
patent: 4380865 (1983-04-01), Frye et al.
patent: 4419813 (1983-12-01), Iwai
patent: 4574263 (1986-03-01), Liddiard
patent: 4592824 (1986-06-01), Smith et al.

Affiliated with

Also associated with

Rating

Method of producing a silicon film with micropores does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of producing a silicon film with micropores, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of producing a silicon film with micropores will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-176377