Method of producing a semiconductor sensor component

Details Method of producing a semiconductor sensor component Method of producing a semiconductor sensor component

2007-01-09

2007-01-09

Geyer, Scott B. (Department: 2812)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

C257SE21001

Reexamination Certificate

active

10473762

ABSTRACT:
A method for manufacturing a semiconductor component, such as, for example, a multilayer semiconductor component including a micromechanical component, such as, for example, a heat transfer sensor having a semiconductor substrate of silicon, and a sensor region. For inexpensive manufacture of a thermal insulation between the semiconductor substrate and the sensor region a porous layer is provided in the semiconductor component.

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