Method of producing a semiconductor device with a heat sink

Etching a substrate: processes – Forming or treating an article whose final configuration has...

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216 17, 216 56, 216100, 216105, 437902, H01L 21027, H01L 2334

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active

056538910

ABSTRACT:
A method of producing a semiconductor device with a convex heat sink that disposes a semiconductor element within a space formed by leads of a lead frame. Bonding pads of the semiconductor element are connected to the leads through wires. The convex heat sink is made from a high heat-conductive material and formed so as to have an outer periphery of a size sufficiently large to overlap the leads. The semiconductor element is disposed at a center portion of the heat sink. An insulator is disposed on the leads. The insulator bonds and fixes the semiconductor element to the heat sink. Resin seals the semiconductor device except for a part of the leads and a top surface of a projecting portion of the heat sink. The insulator has a shape like a tape so as to cover part of the leads and extend along a bottom surface near a circumferential edge of the convex heat sink. The side surface of the projecting portion of the heat sink is scraped out into a curved surface. The method includes providing a thermally conductive material, forming first and second resist films, and etching to produce heat sinks.

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