Method of producing a semi-conductor with a highly doped zone si

Details Method of producing a semi-conductor with a highly doped zone si Method of producing a semi-conductor with a highly doped zone si

1996-06-12

1998-01-06

Niebling, John

Fishing, trapping, and vermin destroying

437 44, H01L 21265

Patent

active

057054100

ABSTRACT:
A method of producing a transistor with a highly doped zone situated between lightly doped zones. This method comprises: a first oblique implant of ions (100) into a first and a second zone (144, 142), a mask (114) being formed at the periphery of a third zone in order to protect the third zone from the ions of the first implant, a second oblique implant of ions (130) into the first and third zones, a mask (115) being formed at the periphery of the second zone (142) in order to protect the second zone (142) from the ions (130) of the second implant, then the formation of a gate of the transistor.

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