Method of producing a platinum-metal pattern or structure by a l

Details Method of producing a platinum-metal pattern or structure by a l Method of producing a platinum-metal pattern or structure by a l

1998-04-24

2000-04-18

Bowers, Charles

Semiconductor device manufacturing: process

Forming schottky junction

Compound semiconductor

438675, 438574, 438579, H01L 2128

Patent

active

06051485&

ABSTRACT:
A method of producing a platinum-metal structure or pattern on a substrate, which includes the steps of applying a silicon oxide layer to the substrate; applying a mask to the silicon oxide layer which is formed with an opening at a location thereof at which the platinum-metal structure or pattern is to be produced; etching the silicon oxide layer so that the substrate surface area exposed by the opening formed in the mask is larger than the opening in the mask; applying a platinum-metal layer to the mask and the exposed substrate surface area; and removing the silicon oxide layer in an etching process, so that the platinum metal present on the mask is removed simultaneously therewith, and the platinum metal present on the substrate surface forms the platinum-metal pattern or structure.

REFERENCES:
patent: 4283483 (1981-08-01), Coane
patent: 4428796 (1984-01-01), Milgram
patent: 4489101 (1984-12-01), Shibata
patent: 4497684 (1985-02-01), Sebesta
patent: 4980316 (1990-12-01), Huebner
patent: 5053348 (1991-10-01), Mishra et al.
patent: 5130764 (1992-07-01), Cetronio et al.
patent: 5155053 (1992-10-01), Atkinson
patent: 5240878 (1993-08-01), Fitzsimmons et al.
patent: 5554488 (1996-09-01), Rioux
patent: 5705432 (1998-01-01), Lee et al.

Affiliated with

Also associated with

Rating

Method of producing a platinum-metal pattern or structure by a l does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of producing a platinum-metal pattern or structure by a l, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of producing a platinum-metal pattern or structure by a l will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2335965