Method of producing a piezoelectric/electrostrictive film elemen

Details Method of producing a piezoelectric/electrostrictive film elemen Method of producing a piezoelectric/electrostrictive film elemen

1998-10-20

2000-08-29

Hall, Carl E.

Metal working

Piezoelectric device making

310324, 310330, 310358, H01L 4122

Patent

active

061088803

ABSTRACT:
A piezoelectric/electrostrictive film element which includes a ceramic substrate having at least one window and a diaphragm portion for closing each window, and a film-like piezoelectric/electrostrictive unit formed on the diaphragm portion. The diaphragm portion has a convex shape and protrudes outwards, in a direction away from the corresponding window. The piezoelectric/electrostrictive unit includes a lower electrode, a piezoelectric/electrostrictive layer and an upper electrode, which are formed in lamination in the order of description on a convex outer surface of the diaphragm portion by a film-forming method. A method of producing the piezoelectric/electrostrictive film element as described above.

REFERENCES:
patent: 4525464 (1985-06-01), Claussen et al.
patent: 5089455 (1992-02-01), Ketcham et al.
patent: 5210455 (1993-05-01), Takeuchi et al.
patent: 5774961 (1998-07-01), Takeuchi et al.

Affiliated with

Also associated with

Rating

Method of producing a piezoelectric/electrostrictive film elemen does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of producing a piezoelectric/electrostrictive film elemen, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of producing a piezoelectric/electrostrictive film elemen will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1235999