Method of producing a piezoelectric/electrostrictive actuator

Details Method of producing a piezoelectric/electrostrictive actuator Method of producing a piezoelectric/electrostrictive actuator

1993-02-04

1997-10-28

Fiorilla, Christopher A.

Adhesive bonding and miscellaneous chemical manufacture

Methods

Surface bonding and/or assembly therefor

427100, C04B 3700

Patent

active

056814100

ABSTRACT:
A method of producing a piezoelectric/electrostrictive actuator including a ceramic substrate and a piezoelectric/electrostrictive portion, including the steps of: superposing on each other a first and a second green sheet which give, by firing thereof, a first layer and a second layer of ceramic substrate, respectively, the first green sheet having at least one opening formed through a thickness thereof; firing the first and second green sheets to form the ceramic substrate such that the second layer cooperates with the at least one opening in the first layer to define at least one recess which has a bottom surface defining a thin-walled portion of the ceramic substrate; and forming the piezoelectric/electrostrictive portion on the thin-walled portion of the ceramic substrate.

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