Method of producing a piezoelectric component

Details Method of producing a piezoelectric component Method of producing a piezoelectric component

2007-12-25

2007-12-25

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S830000, C029S831000, C310S321000

Reexamination Certificate

active

10808949

ABSTRACT:
A method for producing a piezoelectric component comprising at least two stacked crystal filters comprises the steps of depositing of the layer stack above the bottom electrode and the subsequent patterning of the upper electrically conductive layer and, if appropriate, second piezoelectric layers. Thus, it is possible, in a simple manner, with a minimum of process steps, to produce a piezoelectric component comprising two stacked crystal filters which are directly connected to one another via their bottom and central electrodes. The piezoelectric component furthermore has the advantage that applications in which a high stop band attenuation is important can be realized with a relatively small number of filter stages. In this case, through the use of at least two stacked crystal filters, it is possible to achieve an excellent out-of-band rejection also for “single-ended signals”.

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