Method of producing a metallic thin film magnetic disk

Details Method of producing a metallic thin film magnetic disk Method of producing a metallic thin film magnetic disk

1982-02-26

1984-01-17

Pianalto, Bernard D.

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

428900, C23C 1500

Patent

active

044262655

ABSTRACT:
For a metallic thin film magnetic disk, a chromium undercoat and a magnetic layer, in particular of an FeCoCr alloy, are obliquely sputtered by means of a sputtering system onto a substrate at an angle of incidence of about 60.degree.. The operating pressure of the argon gas atmosphere is between 5 and 15 .mu.bar and the thickness (t.sub.Cr) of the undercoat, which also influences the coercive field strength, is between about 50 and 180 nm. By means of a sector shutter of suitable shape, the thickness distribution between the inner diameter ID and the outer diameter OD of the storage area of the magnetic disk can be influenced in the desired manner.

REFERENCES:
patent: 3850690 (1974-11-01), Lee et al.
patent: 3996095 (1976-12-01), Ahu
patent: 4245008 (1981-01-01), Michaelsen et al.
patent: 4260466 (1981-04-01), Shirahata et al.

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