Method of producing a magnetic head slider

Details Method of producing a magnetic head slider Method of producing a magnetic head slider

2006-07-12

2010-10-05

Kim, Paul D (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S603040, C029S603060, C029S603070, C029S603150, C029S603160, C216S022000, C216S039000, C216S041000, C216S048000, C360S235100, C360S235500, C360S235700, C360S235800, C360S236100, C451S005000, C451S041000

Reexamination Certificate

active

07805827

ABSTRACT:
In one embodiment of the present invention, a method of producing a magnetic head slider comprises the steps of forming, on the air bearing surface of the slider, an air bearing surface overcoat, removing the surface region from a hard amorphous carbon film by the irradiation with an ion beam which is tilted with respect to a normal to the air bearing surface, and forming a rail in the air bearing surface on which the air bearing surface overcoat has been formed. A high density and covering performance are obtained when the angle of irradiating the ion beam is not smaller than about 60 degrees from a normal to the air bearing surface of the magnetic head slider and when the acceleration voltage for the ion beam is not higher than about 300 V in the step of removing part of the air bearing surface overcoat.

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Jäger, H.U. and Belov, A. Yu., “ta-C Deposition Simulations: Film Properties and Time Resolved Dynamics of Film Formation”,Physical Review B 68, 2003, pp. 024201.
State Intellectual Property Office of China (SIPO) office action dated Aug. 24, 2007 for SIPO patent application CN2006-10105839.

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