Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal
Reexamination Certificate
2006-02-23
2010-06-15
Ghyka, Alexander G (Department: 2812)
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
C438S029000, C257SE33001, C977S774000, C977S932000
Reexamination Certificate
active
07736919
ABSTRACT:
A nanostructured pn junction light-emitting diode is fabricated from a semi-conducting substrate doped by a first dopant and covered by a dielectric thin layer. An amorphous thin film formed by a semi-conducting material doped by a second dopant of opposite type to that of the first dopant is then deposited on the surface of the dielectric thin layer. The assembly then undergoes a thermal treatment designed to form, in the dielectric thin layer and from the amorphous thin film, a plurality of dots of nanometric size and made of semi-conducting material doped by the second dopant. The dots are designed to be in epitaxial relationship with the substrate to form a plurality of pn junctions of nanometric size. An additional thin layer is then formed by epitaxial growth from the dots.
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Derivaz, et al.; (Apr. 2004); “Grazing incidence x-ray diffraction and atomic force microscopy investigations of geranium dots grown on silicon (001) by successive depositions of geranium through a thin silicon oxide layer”; Applied Physics Letters; vol. 84; No. 17; pp. 3295-3297.
Mazen Frédéric
Noe Pierre
Commissariat a l''Energie Atomique
Ghyka Alexander G
Oliff & Berridg,e PLC
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