Method of producing a layered structure

Details Method of producing a layered structure Method of producing a layered structure

1984-06-15

1985-08-27

Hearn, Brian E.

Metal working

Method of mechanical manufacture

Assembling or joining

29577C, 29591, 357 71, 427 89, H01L 2128, H01L 2188

Patent

active

045369518

ABSTRACT:
A method of forming a layered structure, which method comprises depositing a first metal layer on a substrate, depositing a barrier layer on the first metal layer, depositing a second metal layer on the barrier layer, forming a first masking pattern on the second metal layer, etching the first and second metal layers and the barrier layer in accordance with the first masking pattern, removing the first masking pattern, forming a second masking pattern on the second metal layer, etching the second metal layer in accordance with the second masking pattern, removing the second masking pattern, depositing a dielectric layer having a thickness sufficient to cover the second metal layer, etching the dielectric layer to expose the second metal layer, and depositing on the etched dielectric layer and exposed second metal layer a further metal layer to contact the exposed second metal layer.

REFERENCES:
patent: 4321284 (1982-03-01), Yakushiji
patent: 4392298 (1983-07-01), Barker et al.

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