Method of producing a double-polysilicon bipolar transistor

Fishing – trapping – and vermin destroying

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437162, 437191, 257588, H01L 21265

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054037573

ABSTRACT:
A double-layered structure of the base electrode corresponding to the emitter diffused-region 15 to be formed, which consists of the first and second conducting films 5, 6. This structure effects to prevent the surface of the silicon substrate in the emitter diffused-region to be formed from being etched away by the overetching for forming the base electrode, with much reduction of leakage current due to the consequent damage to the silicon-substrate surface in the emitter diffused-region to be formed, leading to improvement in transistor yield.

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