Drying and gas or vapor contact with solids – Process – With nondrying treating of material
Reexamination Certificate
2003-12-02
2008-10-21
Gravini, S. (Department: 3749)
Drying and gas or vapor contact with solids
Process
With nondrying treating of material
C034S090000
Reexamination Certificate
active
07437834
ABSTRACT:
A substrate processing apparatus10including a vapor generating unit371which generates a mixed gas consisting of an organic solvent vapor and an inert gas by bubbling the inert gas in the organic solvent; support means for supporting a plurality of substrates to be vertically arranged in parallel at equal pitches; a processing vessel15which accommodates multiple substrates supported by the support means; a lid30for covering the upper opening of the processing vessel; jet nozzles33provided in the lid30; and first piping3712, 342, 3421, and3422which causes the vapor generating unit and the jet nozzles to communicate with each other. In the substrate processing apparatus10, the first piping and the jet nozzles are respectively equipped with heaters, and the heaters are controlled by means of dry gas containing organic solvent mists of submicron size being emitted from the jet nozzles. According to the invention, Since micro-size organic solvent vapor is used, the substrate processing method and apparatus of the invention ensures not only high-quality surface processing but also the reduction of processing time.
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Haruki Yoshihiro
Kawate Munenori
Nakatsukasa Katsuyoshi
Ogasawara Kazuhisa
Sakaihara Yoshiaki
Gravini S.
S.E.S. Co., Ltd.
Westerman, Hattori, Daniels & Adrian , LLP.
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