Gas separation: processes – Solid sorption – Including reduction of pressure
Patent
1998-03-30
2000-01-25
Spitzer, Robert
Gas separation: processes
Solid sorption
Including reduction of pressure
95119, 95121, 95130, 95131, 95138, 95142, B01D 53047
Patent
active
060173823
ABSTRACT:
A method of processing semiconductor manufacturing exhaust gases for recovering at least hexafluoroethane in which a feed stream composed of the exhaust gases is passed through an adsorbent bed selected to adsorb oxygen, and also nitrogen if present, but not to appreciably adsorb the hexafluoroethane. As a result, a product stream, discharged from the adsorbent bed, has a higher concentration of hexafluoroethane than in the feed stream. In one embodiment, only a single adsorbent such as carbon molecular sieve is provided to adsorb the oxygen or a modified 4A zeolite could be used to adsorb both oxygen and nitrogen. When nitrogen is a potential constituent, layers of carbon molecular sieve and zeolite are provided to adsorb the oxygen and then the nitrogen, respectively. A third adsorbent, preferably 5A zeolite may be provided in addition to the foregoing two adsorbents to also adsorb any carbon tetrafluoride produced as a by-product.
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Athalye Atul M.
Jain Ravi
Ji Wenchang
Sadkowski Piotr J.
Shen Dongmin
Pace Salvatore P.
Rosenblum David M.
Spitzer Robert
The BOC Group Inc.
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