Method of processing materials using an inductively coupled plas

Details Method of processing materials using an inductively coupled plas Method of processing materials using an inductively coupled plas

1987-04-13

1989-01-03

Paschall, M. H.

Electric heating

Metal heating

By arc

219 7616, 21912148, 21912147, 21912152, 31511151, 427 34, B23K 900

Patent

active

047958790

ABSTRACT:
A method for coating surfaces or implanting ions in an object using an inductively coupled plasma. The method provides a gas-free environment, since the plasma is formed without using a gas. The coating material or implantation material is intitially in solid form.

REFERENCES:
patent: 3710070 (1973-01-01), Hirt et al.
patent: 4370538 (1983-01-01), Browning
patent: 4431901 (1984-02-01), Hull
patent: 4606929 (1986-08-01), Petrakov et al.

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