Method of processing a substrate

Details Method of processing a substrate Method of processing a substrate

2007-07-10

2007-07-10

Morgan, Eileen P. (Department: 3723)

Abrading

Abrading process

Glass or stone abrading

C451S296000, C451S301000, C451S491000, C451S513000, C451S535000

Reexamination Certificate

active

11085495

ABSTRACT:
A method of processing a substrate is disclosed, wherein a sidewall surface of a notch portion formed in a circumferential portion of a substrate to be processed is polished by using a cylindrical polishing head rotatable with an axis as a rotational center.

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