Method of preventing the corrosion of metallic wirings

Details Method of preventing the corrosion of metallic wirings Method of preventing the corrosion of metallic wirings

1992-11-16

1994-05-17

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437187, 437188, 437197, 4271264, 148279, 148DIG131, H01L 7144

Patent

active

053127765

ABSTRACT:
According to the method of preventing the corrosion of metallic wirings of the present invention, aluminium alloy wirings are formed on the surface of a substrate with the use of photoresists, and the photoresists are then removed. Thereafter, HMDS (hexamethyl disilazine) serving as a surface-active agent or its derivative is supplied to the aluminium alloy wirings to form hydrophobic molecular layers on the lateral walls of the aluminium alloy wirings.

REFERENCES:
patent: 4097889 (1978-06-01), Kern et al.
patent: 4585571 (1986-04-01), Bloom
patent: 4938993 (1990-07-01), Bennett
patent: 4988423 (1991-01-01), Yamamoto et al.
patent: 5196372 (1993-03-01), Mikoshiba et al.
patent: 5202291 (1993-04-01), Charvat et al.

Affiliated with

Also associated with

Rating

Method of preventing the corrosion of metallic wirings does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of preventing the corrosion of metallic wirings, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of preventing the corrosion of metallic wirings will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-876564