Method of preventing deterioration of film quality of transparen

Details Method of preventing deterioration of film quality of transparen Method of preventing deterioration of film quality of transparen

1995-03-22

1997-04-15

Fourson, George

Coating processes

Electrical product produced

Transparent base

4271263, 427109, 438609, G02F 113, H01L 21205

Patent

active

056209240

ABSTRACT:
A method of manufacturing a semiconductor device according to the present invention comprises the steps of forming a conductive film on an insulating film, forming growth nucleuses containing any of elements in group IIIb, group IVb, group Vb and group VIIb that does not constitute the conductive film and the insulating film on the surface of the conductive film, and growing a semiconductor selectively on growth nucleuses.

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G.N. Parsons, Applied Physics Letters 59, IBM Research Division, New York, Aug. 16, 1991, pp. 2546-2548.
Chourasa et al. in "nature, vol. 249, May 1974, pp. 28-29, in Ultra thin conducting films of gold on platinum nucleating layers".

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