Method of preventing abnormal large grains from being...

Details Method of preventing abnormal large grains from being... Method of preventing abnormal large grains from being...

2007-10-31

2011-10-11

Gambetta, Kelly M (Department: 1715)

Coating processes

Coating by vapor, gas, or smoke

Carbon or carbide coating

C427S249100, C427S248100, C427S008000

Reexamination Certificate

active

08034411

ABSTRACT:
The present invention relates to a method of preventing abnormal large grains from being included in a NCD thin film during a hot filament CVD process by appropriately controlling the deposition condition regarding a temperature-measuring means, a deposition pressure, an electrical potential and/or the composition of a raw material gas flow.

REFERENCES:
patent: 2002/0011211 (2002-01-01), Halpin
patent: 2006/0219158 (2006-10-01), Breidt et al.
patent: 2008/0063888 (2008-03-01), Sumant et al.
Bieberich et al. Control of Substrate Temperature During Diamond Deposition, 1996, Plasma Chemistry and Plasma Processing, vol. 16, No. 1 pp. 157S-168S.

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