Superconductor technology: apparatus – material – process – Processes of producing or treating high temperature... – Coating
Patent
1992-09-25
1994-04-05
King, Roy
Superconductor technology: apparatus, material, process
Processes of producing or treating high temperature...
Coating
505730, 505732, 427 62, 427596, 427572, 427573, 427576, 4271263, B05D 306, B05D 512
Patent
active
053004850
ABSTRACT:
In order to enable formation of a smooth and dense oxide superconducting film with no clear appearance of grain boundaries in a fine structure even at a high film forming rate, a laser ablation method is employed to apply a laser beam 2 to a target 1 containing components of an oxide superconductive material and deposit particles, which are thus scattered from the target 1, on a substrate 3, while gaseous oxygen is supplied from a gaseous oxygen inlet 7 toward laser plume 6, which is generated by the application of the laser beam 2, and to a portion of the target irradiated with said laser.
REFERENCES:
patent: 5015492 (1991-05-01), Venkatesan et al.
Ying et al, "Spectroscopoc Study of Plasma-assisted laser deposition of Y-Ba-Cu-O", Appl. Phys.Lett. 53(18) Oct. 1988, pp. 1762-1764.
Witanachchi et al, "Deposition of Superconducting Y-Ba-Cu-O films at 400.degree. C. without past-annealing", Appl. Phys. lett. 53(3) Jul. 1988 pp. 234-236.
Lynds et al, "Superconducting thin films of Y-Ba-Cu-O produced by neodymium: yttrium aluminum garnet laser ablation", Appl. Phys. lett. 52(4) Jan. 1988 pp. 320-322.
Singh et al, "In Situ processing of epitaxial Y-Ba-Cu-O high Tc Superconducting films on (100) SrTiO.sub.3 and (100) YS-ZrO.sub.2 substrates at 500.degree.-650.degree. C.," Appl. Phys. lett. 54(22) May 1989 pp. 2271-2273.
Wu et al, "Effect of deposition rate on properties of YBa.sub.2 Cu.sub.3 O.sub.7-8 Superconducting thin films", Appl. Phys. lett. 56(15) Apr. 1990, pp. 1481-1483.
Hara Tsukushi
Hayashi Noriki
Okaniwa Kiyoshi
Okuda Shigeru
Takano Satoshi
King Roy
Samitomo Electric Industries, Ltd.
LandOfFree
Method of preparing oxide superconducting films by laser ablatio does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of preparing oxide superconducting films by laser ablatio, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of preparing oxide superconducting films by laser ablatio will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-511033