Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1990-05-25
1991-07-30
Pianalto, Bernard
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427 451, B05D 306
Patent
active
050359177
ABSTRACT:
Layers consisting of vinylidene fluoride polymers or vinylidene fluoride/trifluoroethylene copolymers can be prepared with a thickness of <10 .mu.m, whereby the dielectric constant or the ferroelectric properties simultaneously correspond to those of known materials. Vinylidene fluoride or a mixture of vinylidene fluoride and trifluoroethylene in a concentration of .ltoreq.5.times.10.sup.-9 mol/cm.sup.3 is subjected to a low pressure plasma polymerization which is excited by microwaves, and the polymer or copolymer is deposited onto a substrate at an electric field strength of <850 V/cm.
REFERENCES:
patent: 4382985 (1983-05-01), Hattori et al.
patent: 4729906 (1988-03-01), Kleeberg et al.
Okada, Y., "Glow-Discharge-Polymerized Difluoroethylene Film", 74 Thin Solid Films, pp. 69-76 (1980).
Kammermaier Johann
Rittmayer Gerhard
Pianalto Bernard
Siemens Aktiengesellschaft
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