Method of preparing high purity dopant alloys

Details Method of preparing high purity dopant alloys Method of preparing high purity dopant alloys

1988-06-27

1990-08-28

Beck, Shrive

Coating processes

Particles, flakes, or granules coated or encapsulated

Solid encapsulation process utilizing an emulsion or...

427219, 427255, 4272552, B05D 512

Patent

active

049524259

ABSTRACT:
Particles of silicon and a p or n carrier substance which are in spherical or spheroidal form, and suitable for use in the preparation of doped semiconductor devices, can be prepared by a fluidized bed technique for chemical vapor deposition of a carrier substance (B, P, As or Sb). The prepared products have a kernel of high purity polysilicon and a layer of silicon/dopant alloy upon the kernel. Optionally, the particles have a thin outer layer of silicon.

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