Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Havin growth from molten state
Patent
1997-04-25
1999-12-28
Kunemund, Robert
Single-crystal, oriented-crystal, and epitaxy growth processes;
Processes of growth from liquid or supercritical state
Havin growth from molten state
117 83, 117 4, 117 6, 117 7, 117953, C30B 1104
Patent
active
060076224
ABSTRACT:
A method is provided for preparing, with high reproducibility, a carbon-doped group III-V compound semiconductor crystal having favorable electrical characteristics and having impurities removed therefrom, and in which the amount of doped carbon can be adjusted easily during crystal growth. This method includes the steps of: filling a crucible with compound raw material, solid carbon, and boron oxide; sealing the filled crucible gas impermeable material; heating and melting the compound raw material under the sealed state in the airtight vessel; and solidifying the melted compound raw material to grow a carbon-doped compound semiconductor crystal.
REFERENCES:
patent: 4999082 (1991-03-01), Kremer et al.
patent: 5131975 (1992-07-01), Bourret-Courchesne
patent: 5515810 (1996-05-01), Yamashita
Journal of Japanese Association of Crystal Growth, Y. Okabe et al. Undoped Semi-Insulating GaAs Single Crystals Grown by VGF Method, vol. 18, 1991, pp. 88-95.
"Low dislocation density and low residual strain semi insulating GaAs grown by vertical boat method". Kawase, T. (Apr. 1996).
Kawase Tomohiro
Tatsumi Masami
Fasse W. F.
Fasse W. G.
Kunemund Robert
Sumitomo Electric Industries Ltd.
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