Method of preparing a monolithic intrinsic infrared focal plane

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29571, 29572, 148172, 148175, 307221D, 357 15, 357 16, 357 24, 357 30, 357 61, H01L 21368, H01L 2182, H01L 2714

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042735963

ABSTRACT:
An infrared (IR) detector device comprised of a solid state, radiation ha and high resolution monolithic IR focal plane array for imaging applications. The monolithic IR focal plane array has a heterostructure injection scheme that prevents charged-coupled device (CCD) "well filling" by using a heterojunction barrier between the absorber, or detector layer, and the transfer layer. Injection of signal charge into a CCD multiplexer is controlled by establishing a punch through condition between the absorber layer and the CCD channel. The detector layer and the CCD multiplexer are on different planes of the focal plane array.

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