Method of predicting a lifetime of filament in ion source...

Details Method of predicting a lifetime of filament in ion source... Method of predicting a lifetime of filament in ion source...

2006-04-25

2006-04-25

Deb, Anjan (Department: 2858)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

For fault location

C324S537000

Reexamination Certificate

active

07034543

ABSTRACT:
An ion source device includes an ion source having a filament for emitting thermoelectrons, a current measuring device for measuring current flowing through the filament, a voltage measuring device for measuring voltage across the filament, a resistance operation device for computing a resistance value of the filament by using the current and the voltage measured by the current and voltage measuring devices, and a prediction operation device for computing a time till the application limits of the filament or a time left till the application limits of the filament.

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Taiwanese Office Action dated Apr. 28, 2005.

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