Method of precision calibration of a microscope and the like

Image analysis – Image enhancement or restoration – Focus measuring or adjusting

Reexamination Certificate

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C250S306000, C250S310000

Reexamination Certificate

active

10966558

ABSTRACT:
A method of precision calibration of a microscope magnification with calculating a magnification scale as a quotient obtained when an image size of a test object viewed or collected with the microscope is divided by a true test object size, the methods comprising the steps of obtaining a magnification reference by taking a diffraction grating with a tested pitch value as the test object; distributing a brightness level between 30–70% amplitude in one of an image of the diffraction grating and a video signal obtained in the microscope; calculating a position of the video signal “center of mass” for each of formed “islands” of the brightness distribution; considering an average distance between neighboring “center of mass” as being a grating pitch in a microscope image of the object; and recognizing that a magnification scale of the microscope is a result of a division of an average pitch dimension by true grating pitch.

REFERENCES:
patent: 4677296 (1987-06-01), Lischke et al.
patent: 4818873 (1989-04-01), Herriot
patent: 5822875 (1998-10-01), Feldner
patent: 5825670 (1998-10-01), Chernoff et al.

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