Method of precisely modifying predetermined surface layers of a

Adhesive bonding and miscellaneous chemical manufacture – Methods – Surface bonding and/or assembly therefor

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156253, 204192C, 204192E, 219121R, 427 38, 427 85, B23K 900, B32B 3100, B05D 306

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active

045590966

ABSTRACT:
A method of precisely modifying a selected area of a workpiece by producing a beam of charged cluster ions that is narrowly mass selected to a predetermined mean size of cluster ions within a range of 25 to 10.sup.6 atoms per cluster ion, and accelerated in a beam to a critical velocity. The accelerated beam is used to impact a selected area of an outer surface of the workpiece at a preselected rate of impacts of cluster ions/cm.sup.2 /sec. in order to effect a precise modification in that selected area of the workpiece.

REFERENCES:
Beuhler et al., "Threshold Studies of Secondary Electron Emission Induced by Macro-Ion Impact on Solid Surfaces", Nuclear Instruments and Methods, 1980, pp. 309-315.
Dietzel et al., "Micrometeoroid Simulation Studies on Metal Targets", Journal of Geophysical Research, Mar. 10, 1972, pp. 1375-1395.
Fischer et al., "Production and Use of Nuclear Tracks: Imprinting Structure on Solids", Reviews of Modern Physics, vol. 56, No. 4, Oct., 1983, pp. 907-948.
Cable, "Hypervelocity Accelerators", Chapter 1, High-Velocity Impact Phenomenon by Kinslow, 1970, pp. 1 and 3-21.
Takagi et al., "Film Formation by Ionised-Cluster Beam Deposition", Low-Energy Ion Beams, 1977, pp. 142-150.

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