Method of positioning patterns from block copolymer...

Details Method of positioning patterns from block copolymer... Method of positioning patterns from block copolymer...

2009-06-11

2010-12-07

Cleveland, Michael (Department: 1712)

Coating processes

Nonuniform coating

Deforming the base or coating or removing a portion of the...

C427S256000, C427S372200, C427S385500, C427S096100, C427S099200, C427S098400

Reexamination Certificate

active

07846502

ABSTRACT:
A method of controlling both alignment and registration (lateral position) of lamellae formed from self-assembly of block copolymers, the method comprising the steps of obtaining a substrate having an energetically neutral surface layer comprising a first topographic “phase pinning” pattern and a second topographic “guiding” pattern; obtaining a self-assembling di-block copolymer; coating the self-assembling di-block copolymer on the energetically neutral surface to obtain a coated substrate; and annealing the coated substrate to obtain micro-domains of the di-block copolymer.

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