Method of positioning elements of an optical integrated circuit

Details Method of positioning elements of an optical integrated circuit Method of positioning elements of an optical integrated circuit

1995-05-15

1996-06-25

Hoffmann, John M.

Glass manufacturing

Processes of manufacturing fibers, filaments, or preforms

With measuring, controlling, sensing, programming, timing,...

65386, 65608, 356401, 437924, 148DIG102, C03B 1914

Patent

active

055295959

ABSTRACT:
The present invention provides a method of manufacturing an optical component, having the steps of forming a first position aligning pattern on a surface of a substrate, forming a second position aligning recess-projection pattern conforming with the first position aligning pattern and a third position aligning recess-projection pattern having a predetermined positional relationship with the second position aligning recess-projection pattern, and applying a predetermined processing with the third position aligning recess-projection pattern used as a reference under a predetermined positional relationship with the first position aligning pattern.

REFERENCES:
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patent: 4233091 (1980-11-01), Kawabe
patent: 4740986 (1988-04-01), Reeder
patent: 4981529 (1991-01-01), Isujita
patent: 5133603 (1992-07-01), Suzuki
patent: 5283205 (1994-02-01), Sakamoto
patent: 5407763 (1995-04-01), Pai

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