Method of positioning disk-shaped workpieces, preferably semicon

Details Method of positioning disk-shaped workpieces, preferably semicon Method of positioning disk-shaped workpieces, preferably semicon

1980-12-29

1983-03-15

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Methods

355 41, 355 43, G03B 2732

Patent

active

043765815

ABSTRACT:
In the photoexposure of semiconductor wafers for the production of circuit elements, the wafers are placed in a prealignment position before being transferred to the exposure stage. A chuck acting as a prepositioning stage is rotatable by one servomotor to set the wafer in its appropriate angular position (.phi. adjustment) and is shiftable by respective servomotors in the X and Y directions. Servomotor control is effected by optical means detecting a noncircular edge portion of the wafer as well as alignment marks on the wafer inwardly of the edge thereof.

REFERENCES:
patent: 3844655 (1974-10-01), Johannsmeier
patent: 3930684 (1976-01-01), Lasch, Jr. et al.
patent: 4295735 (1981-10-01), Lacombat et al.

Affiliated with

Also associated with

Rating

Method of positioning disk-shaped workpieces, preferably semicon does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of positioning disk-shaped workpieces, preferably semicon, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of positioning disk-shaped workpieces, preferably semicon will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1657214