Method of polishing glass substrate

Details Method of polishing glass substrate Method of polishing glass substrate

2009-12-04

2011-12-06

Eley, Timothy V (Department: 3723)

Abrading

Abrading process

Utilizing fluent abradant

C065S061000, C430S005000, C451S041000, C451S056000, C451S057000, C451S060000

Reexamination Certificate

active

08070557

ABSTRACT:
An object of the present invention is to provide a polishing method for diminishing concave defects of a glass substrate used in a reflective mask for EUVL and the like. The invention relates to a method of polishing a glass substrate which comprises polishing a major surface of the glass substrate while feeding a polishing slurry between the glass substrate and a pad surface of a polishing pad, wherein the polishing load of the polishing pad is from 1 to 60 g/cm2. The pad surface of the polishing pact is preferably dressing-processed.

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U.S. Appl. No. 12/635,872, filed Dec. 11, 2009, Kojima, et al.

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