Method of polishing a target surface

Details Method of polishing a target surface Method of polishing a target surface

2011-04-19

2011-04-19

Rose, Robert (Department: 3727)

Abrading

Abrading process

Glass or stone abrading

C451S527000

Reexamination Certificate

active

07927187

ABSTRACT:
A circular polishing pad has grooves formed on the surface in a spiral pattern with its center point offset from the center of the pad. The spiral pattern is an Archimedean spiral pattern or a parabolic spiral pattern. A target object is polished by using such a polishing pad without oscillating the platen to which the polishing pad is pasted or the polishing head that holds the target object.

REFERENCES:
patent: 6135856 (2000-10-01), Tjaden et al.
patent: 7544115 (2009-06-01), O'Moore
patent: 2004/0014413 (2004-01-01), Kawahashi et al.
patent: 2006/0217049 (2006-09-01), Li et al.
patent: 2006/0270325 (2006-11-01), Choi

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