Method of photovoltaic device manufacture

Details Method of photovoltaic device manufacture Method of photovoltaic device manufacture

1992-05-22

1993-06-08

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 4, H01L 21268

Patent

active

052179214

ABSTRACT:
This method of photovoltaic device manufacture has process steps to form a transparent electrode layer comprising at least a tin oxide layer on a transparent substrate, to divide the transparent electrode layer into a plurality of unit areas by laser scribing, and to subsequently heat treat (anneal) the device. The laser for scribing the transparent electrode layer into a plurality of unit areas has an energy density greater than or equal to 21 J/cm.sup.2. Further, when the diameter of the laser beam spot on the transparent electrode layer is D and the distance between pulses is X, the laser satisfies the condition 0.5 D.ltoreq.X.ltoreq.0.85 D.

REFERENCES:
patent: 4292092 (1981-09-01), Hanak
patent: 4783421 (1988-11-01), Carlson et al.
patent: 4854974 (1989-08-01), Carlson et al.
patent: 4954181 (1990-09-01), Nishiura et al.

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