Method of performing model-based scanner tuning

Details Method of performing model-based scanner tuning Method of performing model-based scanner tuning

2011-08-16

2011-08-16

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

Methods

C356S389000

Reexamination Certificate

active

07999920

ABSTRACT:
A model-based tuning method for tuning a first lithography system utilizing a reference lithography system, each of which has tunable parameters for controlling imaging performance. The method includes the steps of defining a test pattern and an imaging model; imaging the test pattern utilizing the reference lithography system and measuring the imaging results; imaging the test pattern utilizing the first lithography system and measuring the imaging results; calibrating the imaging model utilizing the imaging results corresponding to the reference lithography system, where the calibrated imaging model has a first set of parameter values; tuning the calibrated imaging model utilizing the imaging results corresponding to the first lithography system, where the tuned calibrated model has a second set of parameter values; and adjusting the parameters of the first lithography system based on a difference between the first set of parameter values and the second set of parameter values.

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Search Report issued Sep. 22, 2008 in corresponding Singapore matter.
Japanese Office Action mailed Mar. 1, 2011 in corresponding Japanese Patent Application No. 2008-209112.

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