Semiconductor device manufacturing: process – Electron emitter manufacture
Patent
1998-05-26
2000-07-04
Smith, Matthew
Semiconductor device manufacturing: process
Electron emitter manufacture
445 24, 445 49, 445 50, H01L 2100
Patent
active
060837675
ABSTRACT:
A method for forming semiconductor devices involves defining a pattern of microspheres on a first structure and transferring that pattern of microspheres to a semiconductor structure. The microspheres may then be used as a mask to define features on the semiconductor structure. In this way, it is possible to form semiconductor devices without necessarily using a stepper. This may result in substantial capital savings in semiconductor manufacturing processes.
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Tjaden Kevin
Wells David H.
Micro)n Technology, Inc.
Smith Matthew
Yevsikov Victor
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