Method of pattern transfer in photolithography using laser induc

Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of substrate or post-treatment of coated substrate

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427 98, 427123, 427125, 427586, 427581, B05D 306, B05D 512

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051716089

ABSTRACT:
Method for improved photolithography using a laser induced metallization cess to produce a metal mask wherein a work piece surface is treated to have a predetermined pattern of at least two materials each having different electron band gaps, the treated work piece is positioned in a metallizing solution, and the workpiece is exposed to a laser beam having a wavelength corresponding to the electron gap of a selected one of the materials. The method can advantageously be used to produce ohmic contacts for microcircuit devices.

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patent: 5063083 (1991-11-01), Fisch et al.

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